The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
Jan. 11, 2018
Applicant:
Ald Vacuum Technologies Gmbh, Hanau, DE;
Inventors:
Assignee:
ALD VACUUM TECHNOLOGIES GMBH, Hanau, DE;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/56 (2006.01); C23C 14/30 (2006.01); C23C 14/50 (2006.01); F01D 5/28 (2006.01);
U.S. Cl.
CPC ...
C23C 14/562 (2013.01); C23C 14/30 (2013.01); C23C 14/50 (2013.01); C23C 14/505 (2013.01); F01D 5/288 (2013.01); F05D 2230/313 (2013.01); F05D 2230/90 (2013.01);
Abstract
An apparatus and a method for coating workpieces with thermal barrier coatings. A manipulator shaft is guided here through a duct equipped with telescopic segments into the process chamber. The invention permits a particularly compact configuration of the plant.