The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
Nov. 16, 2017
Method of cooling a deposition source, chamber for cooling a deposition source and deposition system
Applied Materials, Inc., Santa Clara, CA (US);
Claire Armstrong, Gummersbach, DE;
Frank Schnappenberger, Johannesberg, DE;
Thomas Deppisch, Aschaffenburg, DE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method () of cooling a deposition source () is described. The method includes stopping () depositing material from the deposition source, the deposition source being arranged in a deposition chamber (), and introducing () a cooling gas into the deposition chamber (), the cooling gas comprising a thermal conductivity λ of λ≥0.05 [W/(m*K)]. Further, a chamber for cooling a deposition source is described. The chamber includes a deposition source being arranged in the chamber. Further, the chamber includes a cooling gas supply system configured for providing a cooling gas into the chamber, the cooling gas comprising a thermal conductivity λ of λ≥0.05 [W/(m*K)].