The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
Feb. 03, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Arvinder Chadha, San Jose, CA (US);
Tomoaki Kohzu, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01T 23/00 (2006.01); B23Q 3/15 (2006.01); H01L 21/683 (2006.01); B23B 31/28 (2006.01);
U.S. Cl.
CPC ...
B23Q 3/15 (2013.01); B23B 31/28 (2013.01); H01L 21/6833 (2013.01);
Abstract
Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceramic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.