The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2023

Filed:

Sep. 04, 2019
Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventors:

Naoki Murakami, Kanagawa, JP;

Daigo Sawaki, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H10N 30/853 (2023.01); C01G 33/00 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); H10N 30/076 (2023.01);
U.S. Cl.
CPC ...
H10N 30/8554 (2023.02); C01G 33/006 (2013.01); C23C 14/08 (2013.01); C23C 14/34 (2013.01); H10N 30/076 (2023.02); C01P 2002/34 (2013.01); C01P 2002/50 (2013.01); C01P 2002/74 (2013.01); C01P 2006/40 (2013.01);
Abstract

To provide a piezoelectric body film and a piezoelectric element from which an excellent piezoelectric characteristic can be obtained even in a high-temperature environment and a method for manufacturing a piezoelectric element. A piezoelectric body film of the present invention is a piezoelectric body film containing a perovskite-type oxide represented by Formula (1), in which a content q of Nb with respect to the number of all atoms in the perovskite-type oxide and a ratio r of a diffraction peak intensity from a (200) plane to a diffraction peak intensity from a (100) plane of the perovskite-type oxide, which is measured using an X-ray diffraction method, satisfy Formula (2), Formula (1) A[(ZrTi)Nb]O, Formula (2) 0.35≤r/q<0.58, in this case, in Formula (1), A represents an A site element containing Pb, x and y each independently represent a numerical value of more than 0 and less than 1, standard values of δ and z each are 0 and 3, but these values may deviate from the standard values as long as the perovskite-type oxide has a perovskite structure, and, in Formula (2), a unit of q is atm %.


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