The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2023
Filed:
Oct. 07, 2021
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Woo Yong Sung, Seoul, KR;
Junghan Seo, Hwaseong-si, KR;
Seungyong Song, Suwon-si, KR;
Sanggab Kim, Seoul, KR;
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H10K 50/844 (2023.01); H10K 59/65 (2023.01); H10K 59/88 (2023.01); H10K 59/121 (2023.01); H10K 71/00 (2023.01); H10K 59/12 (2023.01);
U.S. Cl.
CPC ...
H10K 50/844 (2023.02); H10K 59/121 (2023.02); H10K 59/65 (2023.02); H10K 59/88 (2023.02); H10K 71/00 (2023.02); H10K 59/1201 (2023.02);
Abstract
A manufacturing method includes preparing a substrate, forming at least one groove in the substrate, forming an oxidation resistant film on an inner wall of the groove, and forming a first inorganic layer on the substrate and the oxidation resistant film is formed between the substrate and the first inorganic layer.