The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2023

Filed:

Mar. 11, 2021
Applicant:

Sensor Electronic Technology, Inc., Columbia, SC (US);

Inventors:

Mikhail Gaevski, Columbia, SC (US);

Alexander Dobrinsky, Houston, TX (US);

Maxim S. Shatalov, Mt. Sinai, NY (US);

Michael Shur, Vienna, VA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 33/06 (2010.01); H01L 33/32 (2010.01); H01S 5/343 (2006.01); H01S 5/32 (2006.01); H01L 33/02 (2010.01); H01L 21/683 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 33/0075 (2013.01); H01L 21/6835 (2013.01); H01L 33/007 (2013.01); H01L 33/0093 (2020.05); H01L 33/02 (2013.01); H01L 33/06 (2013.01); H01L 33/32 (2013.01); H01S 5/3209 (2013.01); H01S 5/34333 (2013.01); H01L 21/0242 (2013.01); H01L 21/0254 (2013.01); H01L 21/02458 (2013.01); H01L 21/02664 (2013.01); H01L 2221/68368 (2013.01); H01L 2221/68381 (2013.01);
Abstract

A heterostructure, such as a group III nitride heterostructure, for use in an optoelectronic device is described. The heterostructure can include a sacrificial layer, which is located on a substrate structure. The sacrificial layer can be at least partially decomposed using a laser. The substrate structure can be completely removed from the heterostructure or remain attached thereto. One or more additional solutions for detaching the substrate structure from the heterostructure can be utilized. The heterostructure can undergo additional processing to form the optoelectronic device.


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