The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2023
Filed:
Dec. 22, 2021
Corehw Semiconductor Oy, Tampere, FI;
Markus Hakamo, Lempäälä, FI;
Tomi-Pekka Takalo, Pirkkala, FI;
Petri Kotilainen, Tampere, FI;
Petri Heliö, Tampere, FI;
Tapio Kuiri, Oulu, FI;
COREHW SEMICONDUCTOR OY, Tampere, FI;
Abstract
A capacitor structure implemented as a layered structure including a plurality of alternating dielectric and metallization layers, and a method of manufacturing such capacitor structure. The capacitor structure including at least one lateral parallel plate capacitor part (LPP part) including two first electrodes on two different layers separated by dielectric material of a plurality of the alternating layers, and at least one vertical parallel plate capacitor part (VPP part) including two second electrodes each including a plurality of superimposed slabs or bars arranged on a plurality of the metallization layers. The at least one LPP part is electrically coupled with the at least one VPP part to form the capacitor structure. A variation in capacitance value of the at least one LPP part due to a variation of thickness of dielectric material is at least partially compensated by an opposite variation in capacitance value of the at least one VPP part.