The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2023

Filed:

Sep. 29, 2021
Applicant:

Nidec Sankyo Corporation, Nagano, JP;

Inventor:

Wataru Murata, Nagano, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/67 (2006.01); B25J 9/16 (2006.01); B25J 13/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68707 (2013.01); B25J 9/1656 (2013.01); B25J 13/08 (2013.01); H01L 21/67259 (2013.01);
Abstract

A first sensor is disposed in such a way that optical axes of a light emitting element and a light receiving element thereof are parallel to a left-right direction. A second sensor is disposed in such a way that optical axes of a light emitting element and a light receiving element thereof are parallel to a front-rear direction. When a position of a wafer to be loaded on a loading portion is taught, a position of the loading portion or a teaching jig to be loaded on the loading portion in the front-rear direction is detected by the first sensor by moving a hand in the front-rear direction by a moving mechanism, and a position of the loading portion or the teaching jig in the left-right direction is detected by the second sensor by moving the hand in the left-right direction by the moving mechanism.


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