The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2023
Filed:
Nov. 05, 2020
Horiba Stec, Co., Ltd., Kyoto, JP;
Edward Cocciadiferro, Reno, NV (US);
John Dick, Reno, NV (US);
William W. White, Reno, NV (US);
Maximilian Gundlach, Reno, NV (US);
Patrick Lowery, Reno, NV (US);
HORIBA STEC, Co., Ltd., Kyoto, JP;
Abstract
A gas delivery system is provided comprising an electrical backplane, a system controller operatively coupled to the electrical backplane, and a plurality of mass flow controllers. Each mass flow controller includes respective mass flow control circuitry operatively coupled to the electrical backplane. The system controller and each mass flow control circuitry are physically mounted on the electrical backplane. The gas delivery system further comprises a pump/purge system to help eliminate pressure build up in the system and provide a quick stop to a flow process in the system. Accordingly, a row associated with a flow process may be evaluated so that a mass flow controller may be swapped out as needed.