The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2023

Filed:

Jul. 01, 2021
Applicant:

Samsung Sdi Co., Ltd., Yongin-si, KR;

Inventors:

Kyung Soo Moon, Suwon-si, KR;

Jaehyun Kim, Suwon-si, KR;

Yoong Hee Na, Suwon-si, KR;

Ran Namgung, Suwon-si, KR;

Hwansung Cheon, Suwon-si, KR;

Seungyong Chae, Suwon-si, KR;

Assignee:

Samsung SDI Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); H01L 21/027 (2006.01); G03F 7/20 (2006.01); H01L 21/3213 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0042 (2013.01); G03F 7/2004 (2013.01); H01L 21/0274 (2013.01); H01L 21/31144 (2013.01); H01L 21/32139 (2013.01);
Abstract

A semiconductor resist composition includes-an organometallic compound represented by Chemical Formula 1 and a solvent: wherein, in Chemical Formula 1, Ris an aliphatic hydrocarbon group, an aromatic hydrocarbon group, or an -alkyl-O-alkyl group, and Rto Rare each independently selected from —ORand —OC(═O)R. The semiconductor resist composition may have excellent solubility and storage stability.


Find Patent Forward Citations

Moon, Kyung. (2023). Semiconductor resist composition, and method of forming patterns using the composition (U.S. Patent No. 11789362). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11789362

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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