The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2023

Filed:

Dec. 17, 2018
Applicant:

Nitto Denko Corporation, Ibaraki, JP;

Inventor:

Daiki Morimitsu, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/08 (2006.01); G01R 35/00 (2006.01); C23C 14/54 (2006.01); G01R 31/00 (2006.01);
U.S. Cl.
CPC ...
G01R 27/08 (2013.01); C23C 14/54 (2013.01); G01R 35/00 (2013.01); G01R 31/002 (2013.01);
Abstract

A resistance measurement device for measuring sheet resistance of an electrically conductive film being long in one direction includes two probes disposed to face each other in spaced apart relation so as to allow the electrically conductive film to be interposed therebetween without contacting with the electrically conductive film; a scanning unit that allows the two probes to scan in a cross direction crossing the one direction; and an arithmetic unit that calculates a sheet resistance of the electrically conductive film based on a voltage measured by the two probes. The arithmetic unit includes a memory that memorizes a reference voltage measured by allowing the two probes to scan in the cross direction without interposing the electrically conductive film between the probes. The arithmetic unit corrects an actual voltage by allowing the two probes to scan in the cross direction with the electrically conductive film being interposed between the probes.


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