The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2023

Filed:

May. 08, 2021
Applicant:

Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning, CN;

Inventors:

Lianqing Liu, Liaoning, CN;

Jialin Shi, Liaoning, CN;

Peng Yu, Liaoning, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 60/24 (2010.01); G01Q 10/04 (2010.01); G01Q 20/02 (2010.01); G01Q 60/38 (2010.01); G01Q 70/06 (2010.01);
U.S. Cl.
CPC ...
G01Q 60/38 (2013.01); G01Q 10/045 (2013.01); G01Q 20/02 (2013.01); G01Q 70/06 (2013.01);
Abstract

An atomic force microscope has dual probes composed of a hinge structure, two cantilever beams and needle tips arranged on free ends of the cantilever beams. The hinge structure is a U-shaped body having two ends respectively extended with a first cantilever beam and a second cantilever beam. The free end of the first cantilever beam and the free end of the second cantilever beam are respectively provided with a first needle tip and a second needle tip. The integrated dual probes is operated by the driving function of the probe clamp. Therefore, only a set of motion control and measurement system of the atomic force microscope is required to realize the rapid in-situ switching function of the dual probes.


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