The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2023
Filed:
Feb. 14, 2023
Langfang Zhichi Power Technology Ltd., Langfang, CN;
Beihang University, Beijing, CN;
Tiantong Xu, Beijing, CN;
Haiwang Li, Beijing, CN;
Zhi Tao, Beijing, CN;
Xiaoda Cao, Beijing, CN;
Yanxin Zhai, Beijing, CN;
Chunhui Yang, Beijing, CN;
Haonan Lu, Beijing, CN;
Di An, Beijing, CN;
Hengyi Wang, Beijing, CN;
Zhiyang Wang, Beijing, CN;
Kaiyun Zhu, Beijing, CN;
Weidong Fang, Beijing, CN;
Wenbin Wang, Beijing, CN;
Kaibo Lei, Beijing, CN;
Wensong Xiao, Beijing, CN;
Murun Li, Beijing, CN;
Xiao Zhang, Beijing, CN;
Yang Feng, Beijing, CN;
LANGFANG ZHICHI POWER TECHNOLOGY LTD., Langfang, CN;
BEIHANG UNIVERSITY, Beijing, CN;
Abstract
Provided are a pressure difference sensor, and a manufacturing method and an application thereof. A manner of bonding three layers of wafers is adopted, and the sensor includes an upper structure, an intermediate structure and a lower structure. Each of the upper structure and the intermediate structure is manufactured by a silicon-on-insulator (SOI) wafer, the lower structure is manufactured by patterned doped intrinsic silicon; and a lead pad of each of the upper electrode, and the intermediate electrode and the lower electrode is located on a corresponding one of three-stepped steps at a side of the pressure difference sensor. Annular through holes are formed around the upper electrode and the lower electrode. A constant capacitance of a capacitance signal outputted by an upper capacitor of the sensor by extending an electric field line path of the constant capacitor part.