The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2023
Filed:
Jun. 24, 2020
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Jereld Lee Winkler, Gilbert, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/448 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45557 (2013.01); C23C 16/4481 (2013.01); C23C 16/45527 (2013.01); C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); C23C 16/45587 (2013.01); H01L 21/67017 (2013.01);
Abstract
A semiconductor processing device is disclosed. The semiconductor device includes a reactor and a vaporizer configured to provide a reactant vapor to the reactor. The device can include a process control chamber between the vaporizer and the reactor. The device can include a control system configured to modulate a pressure in the process control chamber based at least in part on feedback of measured pressure in the process control chamber.