The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2023
Filed:
Jan. 21, 2022
Applicant:
Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou City, CN;
Inventors:
Peng Wang, Lanzhou City, CN;
Liqiang Chai, Lanzhou City, CN;
Li Qiao, Lanzhou City, CN;
Xiaogang Bai, Lanzhou City, CN;
Xiaoyu Zhao, Lanzhou City, CN;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/06 (2006.01); C23C 14/02 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0605 (2013.01); C23C 14/022 (2013.01); C23C 14/3407 (2013.01); C23C 14/35 (2013.01); C23C 14/505 (2013.01); C23C 14/543 (2013.01); H01J 37/3405 (2013.01); H01J 37/3426 (2013.01);
Abstract
A hydrogen-free carbon film polymer lubricating material and a preparation method and use thereof are disclosed. In the method, a graphite target is used as the target material, and a magnetron sputtering deposition is performed on a surface of the polymer substrate, thereby physically depositing and forming a hydrogen-free carbon film on the surface of the polymer substrate, thereby obtaining a hydrogen-free carbon film polymer lubricating material.