The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2023

Filed:

Nov. 02, 2020
Applicant:

SK Hynix Inc., Gyeonggi-do, KR;

Inventors:

Sung Hyun Kim, Gyeonggi-do, KR;

Seok Joo Kim, Gyeonggi-do, KR;

Kyung Hyun Nam, Gyeonggi-do, KR;

Jin Sick Shin, Gyeonggi-do, KR;

Hoon Chae, Gyeonggi-do, KR;

Jung Jin Choi, Gyeonggi-do, KR;

Assignee:

SK hynix Inc., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/02 (2006.01); B08B 5/02 (2006.01); G03F 1/82 (2012.01); B05B 1/14 (2006.01);
U.S. Cl.
CPC ...
B08B 3/02 (2013.01); B05B 1/14 (2013.01); B08B 5/02 (2013.01); G03F 1/82 (2013.01); B08B 2203/02 (2013.01); B08B 2220/01 (2013.01);
Abstract

A mask glue removing apparatus includes a first plate including a plurality of nozzles to be adjusted at independent dispensing angles of each other and a head in which the plurality of nozzles are installed and configured to move the head close to a position corresponding to a region of a mask in which glue is present, adjust the dispensing angles of the plurality of nozzles to face the region in which the glue is present, and dispense a chemical liquid, rinse, or air through the plurality of nozzles to remove the glue, and a second plate on which the mask is placed and configured to adjust a position of a main body according to a removal process for the glue.


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