The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2023
Filed:
Jun. 05, 2020
Applicant:
Edwards Vacuum Llc, Sanborn, NY (US);
Inventor:
Imad Mahawili, Roseville, CA (US);
Assignee:
Edwards Vacuum LLC, Sanborn, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 47/02 (2006.01); C23C 14/44 (2006.01); C23C 16/44 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
B01D 47/021 (2013.01); B01D 47/024 (2013.01); B01D 47/025 (2013.01); C23C 16/4412 (2013.01); G03F 7/70916 (2013.01);
Abstract
A liquid filter apparatus for gas/solid separation includes a housing with a filter chamber, a semiconductor process gas inlet, and a process gas outlet. The filter chamber forms a liquid reservoir, and the semiconductor process gas inlet and the process gas outlet are in communication with the filter chamber. The housing further includes a filter liquid inlet and a filter liquid outlet, which are in communication with the liquid reservoir for delivering and removing filter fluid, respectively, to and from the liquid reservoir.