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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11785854 B1

PDFFull Text
Date of Patent:
Oct. 10, 2023

Filed:

Nov. 09, 2018

Film structure and method for manufacturing the same

Applicant:

I-pex Piezo Solutions Inc., Yamaguchi, JP;

Inventors:

Takeshi Kijima, Yamaguchi, JP;

Yasuaki Hamada, Yamaguchi, JP;

Assignee:

I-PEX PIEZO SOLUTIONS INC., Yamaguchi, JP;

Attorney:

Wenderoth, Lind & Ponack, L.L.P.

Primary Examiner:

Shawki S Ismail

Assistant Examiner:

Monica Mata

Int. Cl.
CPC ...
H01L 41/319 (2013.01); H01L 41/187 (2006.01); C23C 14/35 (2006.01); C23C 14/16 (2006.01); C23C 14/30 (2006.01); C23C 14/08 (2006.01); H10N 30/079 (2023.01); H10N 30/87 (2023.01); H10N 30/853 (2023.01); H10N 30/076 (2023.01); H10N 30/078 (2023.01);
U.S. Cl.
CPC ...
H10N 30/079 (2023.02); C23C 14/08 (2013.01); C23C 14/082 (2013.01); C23C 14/083 (2013.01); C23C 14/16 (2013.01); C23C 14/30 (2013.01); C23C 14/35 (2013.01); H10N 30/8554 (2023.02); H10N 30/87 (2023.02); H10N 30/076 (2023.02); H10N 30/078 (2023.02);
Abstract

A film structure includes a substrate () which is a silicon substrate including an upper surface () composed of a (100) plane, an alignment film () which is formed on the upper surface () and includes a zirconium oxide film which has a cubic crystal structure and is (100)-oriented, and a conductive film () which is formed on the alignment film () and includes a platinum film which has a cubic crystal structure and is (100)-oriented. An average interface roughness of an interface (IF) between the alignment film () and the conductive film () is greater than an average interface roughness of an interface (IF) between the substrate () and the alignment film ().

Find Patent Forward Citations

Kijima, Takeshi. (2023). Film structure and method for manufacturing the same (U.S. Patent No. 11785854). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11785854

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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