The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2023
Filed:
Mar. 27, 2018
Vat Holding Ag, Haag, CH;
Daniel Dünser, San Francisco, CA (US);
Clemens Kühne, Mels, CH;
Michael Dür, Hohenweiler, AT;
Rene Bereuter, Pleasanton, CA (US);
VAT HOLDING AG, Haag, CH;
Abstract
Disclosed is a pin lifting device for moving and positioning a substrate. The pin lifting device includes a coupling, a supporting pin configured to support the substrate, and a drive unit which configure to drive the coupling. The pin lifting device includes a separating means for separating a process atmosphere area from an external atmosphere area. The drive unit is at least partially in the external atmosphere area and the coupling is in the process atmosphere area. The coupling includes a linearly extending recess defining a central receiving axis. The recess has a width substantially orthogonally to the receiving axis. A clamping section delimited axially with respect to the receiving axis has a clamping element, in an unloaded receiving state, defines a clamping width that is smaller than the recess width, and the clamping width is variable as a function of a force acting radially on the clamping element.