The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 10, 2023

Filed:

Dec. 23, 2019
Applicant:

Luxembourg Institute of Science and Technology (List), Esch-sur-Alzette, LU;

Inventors:

Patrick Philipp, Steinsel, LU;

Tom Wirtz, Grevenmacher, LU;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/00 (2006.01); G01N 23/2258 (2018.01);
U.S. Cl.
CPC ...
H01J 49/0036 (2013.01); G01N 23/2258 (2013.01);
Abstract

A method for analyzing secondary ion mass spectrum data representing respective secondary ion counts for a range of masses at a given mass resolution. The mass spectrum data is obtained by Secondary Ion Mass Spectrometry, SIMS. Automatic quantification of the ion species and/or cluster ions detected in the analyzed spectrum data is provided.


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