The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Aug. 26, 2022
Applicant:
Quantinuum Llc, Broomfield, CO (US);
Inventors:
Robert Edward Higashi, Shorewood, MN (US);
Son Thai Lu, Plymouth, MN (US);
Elenita Malasmas Chanhvongsak, Lakeville, MN (US);
Assignee:
Quantinuum LLC, Broomfield, CO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 23/48 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76898 (2013.01); H01L 21/76831 (2013.01); H01L 21/76844 (2013.01); H01L 21/76873 (2013.01); H01L 23/481 (2013.01); H01L 23/53238 (2013.01);
Abstract
One or more embodiments are directed to establishing electrical connections through silicon wafers with low resistance and high density, while at the same time maintaining processability for further fabrication. Such connections through silicon wafers enable low resistance connections from the top side of a silicon wafer to the bottom side of the silicon wafer.