The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Aug. 21, 2020
Semes Co., Ltd., Chungcheongnam-do, KR;
Junho Kim, Gyeonggi-do, KR;
Kyungsik Shin, Chungcheongnam-do, KR;
Youngseo An, Gyeonggi-do, KR;
Jinki Shin, Busan, KR;
Man Kyu Kang, Chungcheongnam-do, KR;
Yoonki Sa, Seoul, KR;
SEMES CO., LTD., Chungcheongnam-Do, KR;
Abstract
An apparatus for treating a substrate includes a process chamber having a process space therein, a support unit that supports the substrate in the process space, a heating member that heats the substrate supported on the support unit, and an exhaust unit that evacuates the process space. The exhaust unit includes an exhaust duct and a heat retention unit having a retention space that retains heat released from the process space. The retention space surrounds an adjacent area located adjacent to the process chamber in the exhaust duct.