The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
May. 13, 2021
Nanjing University, Jiangsu, CN;
Aidong Li, Jiangsu, CN;
Qiang Ren, Jiangsu, CN;
Jian Chen, Jiangsu, CN;
Jiabin Fang, Jiangsu, CN;
Min Han, Jiangsu, CN;
NANJING UNIVERSITY, Jiangsu, CN;
Abstract
Disclosed is a flexible hydrogen sensor with ultra-high sensitivity and a wide range and a fabrication method therefor. The sensor includes a conductive electrode layer (), a sensing layer and a flexible substrate layer () in sequence from top to bottom. The sensing layer includes a MOfilm () and Pd nanoparticles (NPs) (), and the Pd NPs () are covered on the MOfilm (). A traditional metal oxide type hydrogen sensor and a quantum conductance-based hydrogen sensor are combined on a flexible polymer substrate by means of an atomic layer deposition (ALD) technology and a cluster beam deposition (CBD) technology, so as to obtain a flexible hydrogen sensor with ultra-high sensitivity, a wide range and excellent selectivity and lower working temperature.