The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Apr. 23, 2019
Nanosystem Solutions, Inc., Okinawa, JP;
Takashi Sugata, Okinawa, JP;
Ryoji Kodama, Okinawa, JP;
NANOSYSTEM SOLUTIONS, INC., Okinawa, JP;
Abstract
There is provided an inspection device allowing surely measuring irregular-shaped parts such as a bevel of a wafer while saving space. An inspection deviceis provided with outer periphery illuminating unitsfor illuminating an outer peripheral region AP of a wafer WA being a target, and an outer periphery imaging unit that images the outer peripheral region AP of the wafer WA. The outer periphery illuminating unitshave arcuate illuminating unitsthat are arranged along a partial region of a circumference CI centered on a reference axis SA and illuminate a predetermined region Aon the reference axis SA, and the reference axis SA of the arcuate illuminating unitsextends in a direction crossing the tangent direction along which an outer peripheral part UA of the wafer WA extends.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile