The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Aug. 21, 2018
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Assignee:
TDK Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/68 (2006.01); C30B 29/20 (2006.01); C30B 29/40 (2006.01); H01L 33/00 (2010.01); H01L 33/12 (2010.01); H01L 33/32 (2010.01); C01F 7/02 (2022.01);
U.S. Cl.
CPC ...
C30B 29/68 (2013.01); C30B 29/20 (2013.01); C30B 29/403 (2013.01); H01L 33/007 (2013.01); H01L 33/12 (2013.01); H01L 33/32 (2013.01); C01F 7/02 (2013.01); Y10T 428/12764 (2015.01);
Abstract
A substratecomprises: a first layer Lcontaining crystalline aluminum nitride; a second layer Lcontaining crystalline α-alumina; and an intermediate layer Lm sandwiched between the first layer Land the second layer Land containing aluminum, nitrogen, and oxygen, and the content of nitrogen in the intermediate layer Lm decreases in a direction Z from the first layer Ltoward the second layer L, and the content of oxygen in the intermediate layer Lm increases in the direction Z from the first layer Ltoward the second layer L