The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
May. 30, 2019
Applicant:
Uchicago Argonne, Llc, Chicago, IL (US);
Inventors:
David Joseph Mandia, Chicago, IL (US);
Angel Yanguas-Gil, Northbrook, IL (US);
Devika Choudhury, Naperville, IL (US);
Aliraeza Nassiri, Woodridge, IL (US);
Anil U. Mane, Naperville, IL (US);
Jeffrey W. Elam, Elmhurst, IL (US);
Assignee:
UChicago Argonne, LLC, Chicago, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/38 (2006.01); C23C 16/56 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C23C 16/38 (2013.01); C23C 16/56 (2013.01);
Abstract
ALD and p-CVD methods to generate MgBand MgB-containing films in the growth temperature range of 250-300° C. The thermal ALD and p-CVD methods shown herein ensure that the high-temperature-induced roughening, which causes high surface resistances in MgBcoatings grown by the mentioned conventional techniques, is avoided. The MgBand MgB-containing films exhibit superconductive properties at above 20° K.