The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 03, 2023

Filed:

Oct. 09, 2018
Applicant:

Drexel University, Philadelphia, PA (US);

Inventors:

Zongquan Gu, Chalfont, PA (US);

Babak Anasori, Fisher, IN (US);

Andrew Lewis Bennett-Jackson, Montclair, NJ (US);

Matthias Falmbigl, Philadelphia, PA (US);

Dominic Imbrenda, Deptford, NJ (US);

Yury Gogotsi, Warminster, PA (US);

Jonathan E. Spanier, Bala Cynwyd, PA (US);

Assignee:

Drexel University, Philadelphia, PA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/58 (2006.01); C23C 16/455 (2006.01); C23C 16/56 (2006.01); C04B 35/468 (2006.01); H01L 21/02 (2006.01); C23C 14/08 (2006.01); C23C 14/02 (2006.01); C23C 14/06 (2006.01); C23C 16/02 (2006.01); C23C 16/32 (2006.01); C23C 16/40 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
C23C 14/088 (2013.01); C04B 35/4682 (2013.01); C04B 35/4686 (2013.01); C23C 14/024 (2013.01); C23C 14/0635 (2013.01); C23C 14/5806 (2013.01); C23C 16/0272 (2013.01); C23C 16/32 (2013.01); C23C 16/409 (2013.01); C23C 16/45531 (2013.01); C23C 16/56 (2013.01); H01L 21/02197 (2013.01); H01L 28/55 (2013.01);
Abstract

The present disclosure is directed to using MXene compositions as templates for the deposition of oriented perovskite films, and compositions derived from such methods. Certain specific embodiments include methods preparing an oriented perovskite, perovskite-type, or perovskite-like film, the methods comprising: (a) depositing at least one perovskite, perovskite-type, or perovskite-like composition or precursor composition using chemical vapor deposition (CVD), physical vapor deposition (PVD), or atomic layer deposition (ALD) onto a film or layer of a MXene composition supported on a substrate to form a layered composition or precursor composition; and either (b) (1) heat treating or annealing the layered precursor composition to form a layered perovskite-type structure comprising at least one oriented perovskite, perovskite-type, or perovskite-like composition; or (2) annealing the layered composition; or (3) both (1) and (2).


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