The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 03, 2023

Filed:

Sep. 08, 2022
Applicant:

Mirrorcle Technologies, Inc., Richmond, CA (US);

Inventors:

Stefan Richter, Jena, DE;

Johannes Kindt, Weimar, DE;

Veljko Milanovic, Richmond, CA (US);

Assignee:

MIRRORCLE TECHNOLOGIES, INC., Richmond, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); H02N 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0078 (2013.01); H02N 1/008 (2013.01); B81B 2201/04 (2013.01); B81B 2203/0154 (2013.01); B81B 2203/058 (2013.01);
Abstract

MEMS devices include a suspended element connected to a fixed part of a substrate by one or more flexures, wherein the one or more flexures are configured to permit movement of the suspended element relative to a fixed part of the substrate. An actuator coupled to the suspended element and a damping structure coupled to the suspended element extends into a gap between the suspended element and the fixed part of the substrate. One or more fluid confinement structures are configured to permit movement of the damping structure within a limited portion of the gap and to confine a viscoelastic fluid to the limited portion of the gap.


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