The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Aug. 26, 2021
Applicant:
Furukawa Electric Co., Ltd., Tokyo, JP;
Inventors:
Assignee:
FURUKAWA ELECTRIC CO., LTD., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B01D 1/06 (2006.01); B01D 1/00 (2006.01); C03B 37/014 (2006.01);
U.S. Cl.
CPC ...
B01D 1/0064 (2013.01); B01D 1/06 (2013.01); B01L 13/00 (2019.08); C03B 37/01413 (2013.01);
Abstract
A method for cleaning a vaporizer that vaporizes, at normal temperature and pressure, a source material in a liquid state, and supplies the vaporized source material to a reactor through a supply pipe, includes a cleaning step of passing the source material to the vaporizer while maintaining the source material in a liquid state to clean the vaporizer.