The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 26, 2023

Filed:

Sep. 23, 2020
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Alexander Berger, Palo Alto, CA (US);

Paul Lawrence Korff, Sunnyvale, CA (US);

William Paul Laceky, Georgetown, TX (US);

Jeffrey C. Hudgens, San Francisco, CA (US);

Rajkumar Thanu, Santa Clara, CA (US);

Damon K. Cox, Jarrell, TX (US);

Matvey Farber, Redwood City, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 19/00 (2006.01); H02K 7/18 (2006.01); B25J 17/00 (2006.01); B25J 13/08 (2006.01); B25J 9/10 (2006.01); H02K 1/278 (2022.01); H02K 17/44 (2006.01); H02K 16/00 (2006.01); H02K 21/28 (2006.01); H02K 7/11 (2006.01); B25J 11/00 (2006.01);
U.S. Cl.
CPC ...
H02K 7/1807 (2013.01); B25J 9/108 (2013.01); B25J 13/088 (2013.01); B25J 17/00 (2013.01); B25J 19/0029 (2013.01); H02K 1/278 (2013.01); H02K 7/11 (2013.01); H02K 16/005 (2013.01); H02K 17/44 (2013.01); H02K 21/28 (2013.01); B25J 11/0095 (2013.01); B25J 19/005 (2013.01);
Abstract

A robot device includes a first link and a second link coupled to the first link via an elbow. One or more of the first link or the second link rotates about an axis of the elbow. The robot device further includes a generator disposed in the elbow. The generator is configured to generate electrical power based on relative angular mechanical movement associated with the elbow. The robot device further includes an end effector configured to transport a substrate within a substrate processing system. The end effector is disposed at a distal end of the second link. The end effector is to receive the electrical power generated by the generator.


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