The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2023
Filed:
Dec. 13, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Tejas Ulavi, San Jose, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Naveen Kumar Nagaraja, Karnataka, IN;
Sanjeev Baluja, Campbell, CA (US);
Surajit Kumar, San Jose, CA (US);
Dhritiman Subha Kashyap, Bangalore, IN;
Ashutosh Agarwal, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Substrate supports comprising a plurality of bonded plates forming a single component support body and methods of forming the substrate supports are described. The single component support body has an outer peripheral edge, a top surface and a bottom surface. A pocket is formed in the top surface and has a bottom surface, a depth and an outer peripheral edge. A purge ring is spaced a distance from the outer peripheral edge and comprises at least one opening in the top surface in fluid communication with a purge gas line within the body thickness.