The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2023
Filed:
Apr. 25, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Wendell Glenn Boyd, Jr., Morgan Hill, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Teng-Fang Kuo, Santa Clara, CA (US);
Zhenwen Ding, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/687 (2006.01); C03C 17/00 (2006.01); G03F 7/00 (2006.01); H02N 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); C03C 17/00 (2013.01); H01L 21/6875 (2013.01); H01L 21/68757 (2013.01); G03F 7/707 (2013.01); H01L 21/683 (2013.01); H01L 21/6831 (2013.01); H02N 13/00 (2013.01);
Abstract
A coated chamber component comprises a body and a protective ceramic coating deposited over a surface of the body, the protective ceramic coating being amorphous and comprising about 8-20% by weight yttrium, about 20-32% by weight aluminum, and about 60-70% by weight oxygen.