The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 26, 2023

Filed:

Nov. 04, 2021
Applicant:

Persimmon Technologies Corporation, Wakefield, MA (US);

Inventors:

Christopher Hofmeister, Hampstead, NH (US);

Martin Hosek, Salem, NH (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); F16C 32/04 (2006.01); H02J 50/10 (2016.01); H02J 50/12 (2016.01); H02J 50/90 (2016.01); H02J 50/05 (2016.01);
U.S. Cl.
CPC ...
H01L 21/67709 (2013.01); F16C 32/0434 (2013.01); F16C 32/0465 (2013.01); F16C 32/0472 (2013.01); H01L 21/67742 (2013.01); H02J 50/10 (2016.02); H02J 50/12 (2016.02); H02J 50/90 (2016.02); H02J 50/05 (2016.02);
Abstract

An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.


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