The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2023
Filed:
Sep. 22, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Ala Moradian, Sunnyvale, CA (US);
James Omer L'Heureux, Santa Clara, CA (US);
Shuran Sheng, Saratoga, CA (US);
Rohit Mahakali, Bangalore, IN;
Karthik Ramanathan, Bangalore, IN;
Lin Zhang, San Jose, CA (US);
Umesh Madhav Kelkar, Cupertino, CA (US);
Gopalakrishna B. Prabhu, San Jose, CA (US);
Zheng Yuan, Santa Clara, CA (US);
Jeonghoon Oh, Saratoga, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes receiving measurement data from multiple sensors positioned along a delivery line that delivers a liquid as a gas to one of a gas panel or a processing chamber; simulating, using a computer-generated model, one or more process parameters associated with the delivery line and a plurality of heater jackets positioned around the delivery line; comparing the measurement data with values of the one or more process parameters; and determining, based on at least a threshold deviation between the measurement data and the values of the one or more process parameters, that a fault exists that is associated with maintaining temperature within the delivery line consistent with a gaseous state of the liquid.