The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2023
Filed:
May. 13, 2022
Azbil Corporation, Tokyo, JP;
Yasuhide Yoshikawa, Chiyoda-ku, JP;
Keisuke Obara, Chiyoda-ku, JP;
Jun Ichihara, Chiyoda-ku, JP;
Kimihiro Sato, Chiyoda-ku, JP;
AZBIL CORPORATION, Tokyo, JP;
Abstract
An improved diaphragm vacuum gauge including a sensor chip that includes a first electrode provided on a base and a second electrode provided on a diaphragm so as to face the first electrode, the diaphragm and the base being disposed with a gap therebetween, and in which a distance between the first electrode and the second electrode changes in accordance with displacement of the diaphragm caused by pressure of a measurement target medium. The diaphragm vacuum gauge further includes an operational amplifier that converts a current output from the first electrode to a voltage and amplifies the voltage, and a coaxial cable that connects the first electrode and the operational amplifier with each other. Further, the first electrode is connected to a virtual ground of the operational amplifier by a core wire of the coaxial cable.