The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2023
Filed:
Jan. 16, 2020
Applicants:
Nikon Corporation, Tokyo, JP;
Kanagawa University, Yokohama, JP;
Inventors:
Yusuke Kawakami, Yokohama, JP;
Kazuo Yamaguchi, Yokohama, JP;
Assignees:
NIKON CORPORATION, Tokyo, JP;
KANAGAWA UNIVERSITY, Yokohama, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07D 495/04 (2006.01); C07D 409/12 (2006.01); C07F 7/08 (2006.01); G03F 7/075 (2006.01); H10K 71/00 (2023.01); H10K 85/40 (2023.01); H10K 85/60 (2023.01);
U.S. Cl.
CPC ...
C07D 495/04 (2013.01); C07D 409/12 (2013.01); C07F 7/0834 (2013.01); G03F 7/075 (2013.01); H10K 71/621 (2023.02); H10K 85/40 (2023.02); H10K 85/6576 (2023.02);
Abstract
What is provided is a compound, a pattern forming substrate, a coupling agent, and a pattern formation method. The compound is represented by Formula (1).