The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2023
Filed:
Jun. 17, 2021
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventor:
Yuya Matsubara, Yokkaichi, JP;
Assignee:
Kioxia Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/22 (2006.01); C01B 23/00 (2006.01);
U.S. Cl.
CPC ...
B01D 53/229 (2013.01); C01B 23/0094 (2013.01); B01D 2053/223 (2013.01); B01D 2258/0216 (2013.01); C01B 2210/0031 (2013.01); C01B 2210/0065 (2013.01); C01B 2210/0098 (2013.01); C01P 2006/82 (2013.01);
Abstract
According to one embodiment, a gas recovering apparatus includes a casing and a tube. The casing is provided with an inlet through which a gas flows in, a first outlet for discharging a first gas containing a gas to be recovered of the gas, and a second outlet for discharging a second gas other than the first gas of the gas. The casing is evacuated via the first outlet. The tube is provided in the casing from the inlet to the second outlet, and has a high permeability to the first gas and a low permeability to the second gas.