The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
Jul. 17, 2020
Semes Co., Ltd., Chungcheongnam-do, KR;
Muhyeon Lee, Chungcheongnam-do, KR;
Gui Su Park, Chungcheongnam-do, KR;
Byungsun Bang, Gyeonggi-do, KR;
Jungbong Choi, Gyeonggi-do, KR;
Youngil Lee, Chungcheongnam-do, KR;
Kangseop Yun, Chungcheongnam-do, KR;
Seung Eun Na, Gyeonggi-do, KR;
Ye Jin Choi, Seoul, KR;
Kyounghwan Kim, Seoul, KR;
SEMES CO., LTD., Chungcheongnam-Do, KR;
Abstract
An apparatus for treating a substrate includes a process chamber having a treatment space defined therein, a support unit for supporting the substrate in the treatment space, a liquid supply unit for supplying treating liquid to the substrate supported on the support unit, and a heating unit disposed in the support unit for heating the substrate supported on the support unit, wherein the heating unit includes a plurality of lamps to heat the substrate, and a window disposed above the lamps to transmit light emitted from the lamps, wherein the window includes a base in a form of a plate, and light adjustment means formed on the base to spread or converge light emitted from the lamps.