The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 19, 2023

Filed:

Apr. 02, 2019
Applicant:

Corning Incorporated, Corning, NY (US);

Inventors:

Robert Alan Bellman, Ithaca, NY (US);

Jin Su Kim, Seoul, KR;

Assignee:

CORNING INCORPORATED, Corning, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/053 (2006.01); B32B 3/30 (2006.01); B32B 17/06 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); C03C 15/00 (2006.01); H01L 21/52 (2006.01); H01L 23/04 (2006.01); H01L 23/26 (2006.01); H01L 27/146 (2006.01); H01L 31/0203 (2014.01); H01L 31/18 (2006.01); H01L 33/48 (2010.01); H01L 23/10 (2006.01); H01L 23/08 (2006.01);
U.S. Cl.
CPC ...
H01L 23/053 (2013.01); B32B 3/30 (2013.01); B32B 17/06 (2013.01); B81B 7/0038 (2013.01); B81B 7/0067 (2013.01); B81C 1/00317 (2013.01); C03C 15/00 (2013.01); H01L 21/52 (2013.01); H01L 23/041 (2013.01); H01L 23/08 (2013.01); H01L 23/10 (2013.01); H01L 23/26 (2013.01); H01L 27/14618 (2013.01); H01L 27/14683 (2013.01); H01L 31/0203 (2013.01); H01L 31/18 (2013.01); H01L 33/483 (2013.01); B32B 2315/08 (2013.01); B32B 2457/14 (2013.01); B81C 2203/0109 (2013.01); H01L 2933/0033 (2013.01);
Abstract

Wafer level encapsulated packages includes a wafer, a glass substrate hermetically sealed to the wafer, and an electronic component. The glass substrate includes a glass cladding layer fused to a glass core layer and a cavity formed in the glass substrate. The electronic component is encapsulated within the cavity. In various embodiments, the floor of the cavity is planar and substantially parallel to a plane defined by a top surface of the glass cladding layer. The glass cladding layer has a higher etch rate in an etchant than the glass core layer. In various embodiments, the wafer level encapsulated package is substantially optically transparent. Methods for forming the wafer level encapsulated package and electronic devices formed from the wafer level encapsulated package are also described.


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