The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 19, 2023

Filed:

Jun. 11, 2020
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Chaemook Lim, Yongin-si, KR;

Yeongrack Son, Seoul, KR;

Ohhyuk Kwon, Suwon-si, KR;

Dongouk Kim, Chuncheon-si, KR;

Youngbum Kim, Yongin-si, KR;

Woohee Kim, Ansan-si, KR;

Dongjoon Lee, Suwon-si, KR;

Kwanghyeon Jeong, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/263 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67248 (2013.01); H01L 21/02255 (2013.01); H01L 21/2636 (2013.01);
Abstract

A process apparatus includes a heating module and a supporter disposed below the heating module. A process space is provided between the heating module and the supporter. The heating module includes a housing, at least one heating lamp disposed in the housing, at least one temperature sensor disposed in the housing, and a blocking plate disposed under the housing. The blocking plate spatially separates the at least one heating lamp from the process space, and the blocking plate includes at least one window spatially connecting the at least one temperature sensor to the process space.


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