The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
Nov. 18, 2020
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Jung Suk Goh, Hwaseong-si, KR;
Sun Mi Kim, Jeollanam-do, KR;
Ji Su Hong, Asan-si, KR;
Kuk Saeng Kim, Goyang-si, KR;
Cheng Bin Cui, Suwon-si, KR;
Pil Kyun Heo, Hwaseong-si, KR;
Assignee:
SEMES CO., LTD., Cheonan-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 3/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6708 (2013.01); B08B 3/041 (2013.01); H01L 21/67253 (2013.01);
Abstract
Disclosed is a substrate treatment apparatus. The apparatus includes a support unit that supports and rotates a substrate and a spray unit equipped with one or more nozzles to spray a dual fluid that is a mixture of a cleaning agent and carbon dioxide onto the substrate.