The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
Jan. 27, 2020
Universiteit Gent, Ghent, BE;
Imec Vzw, Leuven, BE;
Vmicro Sas, Villeneuve d'Ascq, FR;
Cnrs, Paris, FR;
Isen Yncréa Hauts-de-france, Lille, FR;
Université DE Lille, Lille, FR;
Ecole Centrale DE Lille, Villeneuve-d'Ascq, FR;
Université Polytechnique Hauts-de-france, Valenciennes, FR;
Bart Kuyken, Ghent, BE;
Mathias Vanwolleghem, Melle, BE;
Mattias Verstuyft, Brussels, BE;
Benjamin Walter, Lille Hellemmes, FR;
Jean-Francois Lampin, Templeuve, FR;
Abstract
An integrated photoacoustic transducer, sensing system and method for assisting in sensing a concentration of a species in a fluid such that the integrated photoacoustic transducer includes a waveguide structure. The waveguide structure has an optical resonance spectrally overlapping a spectral absorption line or band of the species. The photoacoustic transducer includes at least one acoustic cavity formed in a portion of the waveguide structure and configured for receiving the fluid for sensing comprising the species. The at least one acoustic cavity has an acoustic resonance spectrally overlapping with a harmonic of a modulation frequency. At least one acoustic transducer comprising a deformable mechanical portion is included in the photoacoustic transducer. The deformable mechanical portion is in direct acoustic communication with the at least one acoustic cavity and has an adjustable mechanical resonance, which can be brought into spectral overlap with an acoustic resonance of the least one acoustic cavity.