The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 19, 2023

Filed:

Oct. 21, 2022
Applicant:

Sensirion Ag, Stäfa, CH;

Inventors:

Frank Gütle, Stäfa, CH;

Lukas Hoppenau, Stäfa, CH;

Lukas Rüthemann, Stäfa, CH;

David Pustan, Stäfa, CH;

Werner Hunziker, Stäfa, CH;

Assignee:

Sensirion AG, Stäfa, CH;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 15/06 (2006.01);
U.S. Cl.
CPC ...
G01N 15/06 (2013.01); G01N 2015/0693 (2013.01);
Abstract

A particulate matter (PM) sensor comprises a substrate forming a cavity (), the substrate comprising a semiconductor chip (), and a light source () arranged in the cavity (). The light source () is adapted to emit a light beam (). The light beam () forms a detection volume () for particulate matter () outside the cavity (). Optionally, the particulate matter sensor comprises an optical element () delimiting the cavity () at one end. The optical element () is configured to shape the light beam (). Further, the particulate matter sensor comprises at least one photodetector () that is integrated into a surface of the semiconductor chip (). The surface into which the at least one photodetector () is integrated faces the detection volume (). The at least one photodetector () is adapted to detect light () scattered by particulate matter () in the detection volume ().


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