The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
Sep. 24, 2021
Applicant:
Semes Co., Ltd, Cheonan-si, KR;
Inventors:
Jeeyong Jung, Cheonan-si, KR;
Dongyun Lee, Cheonan-si, KR;
Assignee:
SEMES CO., LTD, Cheonan-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 14/00 (2018.01); B05B 15/40 (2018.01);
U.S. Cl.
CPC ...
B05B 14/00 (2018.02); B05B 15/40 (2018.02);
Abstract
An apparatus for supplying chemical liquid may include a chemical liquid supply head, a receiving member, a removing member and a supplying member. The chemical liquid supply head may provide a chemical liquid onto a substrate. The receiving member may receive a recycle chemical liquid discharged from the chemical liquid supply head, and the removing member may remove impurities remaining in the recycle chemical liquid received in the receiving member. The supplying member may provide the recycle chemical liquid from which the impurities are removed to the chemical liquid supply head.