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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11759749 B1

PDFFull Text
Date of Patent:
Sep. 19, 2023

Filed:

Aug. 13, 2020

Filtering device, purification device, and method for manufacturing chemical liquid

Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventors:

Tadashi Omatsu, Haibara-gun, JP;

Tetsuya Kamimura, Haibara-gun, JP;

Tetsuya Shimizu, Haibara-gun, JP;

Satomi Takahashi, Haibara-gun, JP;

Assignee:

FUJIFILM Corporation, Tokyo, JP;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Bradley R Spies

Int. Cl.
CPC ...
B01D 61/08 (2006.01); B01D 61/18 (2006.01); B01D 61/58 (2006.01); B01D 69/02 (2006.01); B01D 71/26 (2006.01); G03F 7/26 (2006.01); H01L 21/67 (2006.01); B01D 3/14 (2006.01); B01D 65/02 (2006.01); B01D 69/12 (2006.01); B01D 71/36 (2006.01); B01D 71/56 (2006.01);
U.S. Cl.
CPC ...
B01D 61/58 (2013.01); B01D 3/145 (2013.01); B01D 61/08 (2013.01); B01D 61/18 (2013.01); B01D 65/02 (2013.01); B01D 69/02 (2013.01); B01D 69/12 (2013.01); B01D 71/26 (2013.01); B01D 71/36 (2013.01); B01D 71/56 (2013.01); H01L 21/67017 (2013.01); B01D 2311/25 (2013.01); B01D 2311/2669 (2013.01); B01D 2313/50 (2013.01); B01D 2317/025 (2013.01); B01D 2317/08 (2013.01); B01D 2325/02 (2013.01); B01D 2325/36 (2013.01); B01D 2325/42 (2013.01); G03F 7/26 (2013.01);
Abstract

A filtering device for obtaining a chemical liquid by purifying a liquid to be purified has an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path which includes the filter A and the filter B arranged in series between the inlet portion and the outlet portion and extends from the inlet portion to the outlet portion, in which the filter A has a porous base material made of polyfluorocarbon and a coating layer which is disposed to cover the porous base material and contains a first resin having a hydrophilic group.

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