The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2023
Filed:
May. 31, 2017
Applicant:
Advanced Material Technologies Inc., Chiba, JP;
Inventor:
Takeshi Kijima, Yamaguchi, JP;
Assignee:
KRYSTAL INC., Yamaguchi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/083 (2006.01); H10N 30/50 (2023.01); C23C 14/35 (2006.01); C23C 14/30 (2006.01); C23C 14/08 (2006.01); C30B 29/32 (2006.01); C30B 1/02 (2006.01); C30B 29/68 (2006.01); C30B 23/02 (2006.01); H10N 30/05 (2023.01); H10N 30/06 (2023.01); H10N 30/076 (2023.01); H10N 30/078 (2023.01); H10N 30/87 (2023.01); H10N 30/00 (2023.01); H10N 30/853 (2023.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); C30B 29/22 (2006.01); C30B 33/02 (2006.01);
U.S. Cl.
CPC ...
H10N 30/508 (2023.02); C23C 14/08 (2013.01); C23C 14/083 (2013.01); C23C 14/088 (2013.01); C23C 14/30 (2013.01); C23C 14/34 (2013.01); C23C 14/35 (2013.01); C23C 14/5806 (2013.01); C30B 1/02 (2013.01); C30B 23/02 (2013.01); C30B 23/025 (2013.01); C30B 29/22 (2013.01); C30B 29/32 (2013.01); C30B 29/68 (2013.01); C30B 33/02 (2013.01); H10N 30/05 (2023.02); H10N 30/06 (2023.02); H10N 30/076 (2023.02); H10N 30/078 (2023.02); H10N 30/1051 (2023.02); H10N 30/8554 (2023.02); H10N 30/877 (2023.02);
Abstract
A film structure () includes a substrate (), a piezoelectric film () formed on the substrate () and containing first composite oxide represented by a composition formula Pb(ZrTi)O, and a piezoelectric film () formed on the piezoelectric film () and containing second composite oxide represented by a composition formula Pb(ZrTi)O. In the composition formulae, x satisfies 0.10<x≤0.20, and y satisfies 0.35≤y≤0.55. The piezoelectric film () has tensile stress, and the piezoelectric film () has compressive stress.