The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2023
Filed:
Jul. 15, 2022
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Harunobu Matsui, Joetsu, JP;
Daijitsu Harada, Joetsu, JP;
Daiyu Okafuji, Joetsu, JP;
Hiroyuki Yamazaki, Joetsu, JP;
Masaki Takeuchi, Joetsu, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/48 (2010.01); B32B 7/12 (2006.01); B32B 17/00 (2006.01); C03C 27/10 (2006.01); H01L 31/0203 (2014.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 33/483 (2013.01); B32B 7/12 (2013.01); B32B 17/00 (2013.01); C03C 27/10 (2013.01); H01L 31/0203 (2013.01); H01L 31/18 (2013.01); B32B 2457/00 (2013.01); H01L 2933/0033 (2013.01);
Abstract
A synthetic quartz glass cavity member () is bonded to a substrate () having an optical device () mounted thereon such that the device may be accommodated in the cavity member. The cavity member () has an inside surface consisting of a top surface () opposed to the device () and a side surface (). The top surface () is a mirror surface and the side surface () is a rough surface.