The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 12, 2023

Filed:

May. 27, 2021
Applicant:

Meta Platforms, Inc., Menlo Park, CA (US);

Inventors:

Sandeep Rekhi, San Jose, CA (US);

Pradip Sairam Pichumani, Bellevue, WA (US);

Assignee:

META PLATFORMS, INC., Menlo Park, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 37/00 (2012.01); H01L 21/67 (2006.01); B24B 37/34 (2012.01); B24B 37/24 (2012.01);
U.S. Cl.
CPC ...
H01L 21/67219 (2013.01); B24B 37/245 (2013.01); B24B 37/34 (2013.01);
Abstract

A system for polishing a sample is provided. The system may comprise a motor. The system may also include a polishing element that is actuated by the motor. The system may also have a sample holder. The sample holder may hold a sample to be polished by the polishing element. In some examples, the sample holder has multiple degrees of movement in order to precisely polish, grind, or bevel the sample. In some examples, the system may further include an arm having a slurry dispenser, inlets for fluid, and a squeegee-like element to clean, wash, or brush off debris from the polishing element during a polishing process.


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