The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 12, 2023

Filed:

Dec. 27, 2019
Applicant:

Meta Platforms Technologies, Llc, Menlo Park, CA (US);

Inventors:

Oscar Torrents Abad, Cork, IE;

Daniel Brodoceanu, Cork, IE;

Ali Sengül, Zurich, CH;

Pooya Saketi, Cork, IE;

Assignee:

Meta Platforms Technologies, LLC, Menlo Park, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B25J 15/00 (2006.01); B65G 47/90 (2006.01); B81C 1/00 (2006.01); B25J 7/00 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67144 (2013.01); B65G 47/905 (2013.01); B81C 1/00142 (2013.01); B81C 1/0015 (2013.01); H01L 21/67253 (2013.01); H01L 21/67259 (2013.01); B25J 7/00 (2013.01); B81B 3/0035 (2013.01); B81B 2203/0109 (2013.01); B81B 2203/0145 (2013.01);
Abstract

A pick-up head picks up a semiconductor device from a carrier substrate. The pick-up head includes a first leg portion, a second leg portion, a raised bridge base portion between the first and second leg portions, and a tip portion mounted on the raised bridge base portion. The tip portion engages with the semiconductor device to pick up the semiconductor device from the carrier substrate. The pick-up head is associated with a force detection mechanism that detects a force applied to the pick-up head for picking up the semiconductor device. The force detection mechanism includes cavities formed on the first leg portion and/or second leg portion, pillars arranged on the pick-up head, a force detection device arranged in a mount assembly that is attached on the pick-up head, or electrodes arranged on the mount assembly. Actuation of the pick-up head is determined based on the detected force.


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