The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 12, 2023

Filed:

Jul. 13, 2020
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Philipp Staudinger, Horgen, CH;

Heinz Schmid, Waedenswil, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/04 (2006.01); H01L 21/02 (2006.01); H01L 29/04 (2006.01); H01L 29/20 (2006.01); H01L 29/161 (2006.01); H01L 29/16 (2006.01); C30B 25/02 (2006.01); C30B 29/48 (2006.01); C30B 29/36 (2006.01); C30B 29/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02645 (2013.01); C30B 25/02 (2013.01); C30B 25/04 (2013.01); C30B 29/48 (2013.01); H01L 21/02647 (2013.01); H01L 29/04 (2013.01); H01L 29/161 (2013.01); H01L 29/1608 (2013.01); H01L 29/20 (2013.01); H01L 29/2003 (2013.01); C30B 29/36 (2013.01); C30B 29/40 (2013.01);
Abstract

A method for fabricating a metastable crystalline structure is provided. The method includes providing a base substrate, wherein the base substrate comprises an insulating layer. The method further includes providing a metastable seed crystal on the base substrate, wherein the metastable seed crystal has a predefined metastable crystal phase or a predefined metastable composition. The method further includes forming a template structure above the base substrate, wherein the template structure covers at least a part of the metastable seed crystal. The method further includes growing the metastable crystalline structure with the predefined metastable crystal phase or the predefined metastable composition of the seed crystal inside the template structure. The growing of the metastable crystalline structure is nucleated from the seed crystal. Crystalline structures produced by the methods described herein are also provided.


Find Patent Forward Citations

Loading…